Modeling defect-cluster formation in crystalline silicon

Authors: Robert A. Brown, Talid Sinno, Z. Kurt Jiang
Publication Date: March 15, 1996

Citation: Z. K. Jiang, T. Sinno, R. A. Brown, Modeling defect-cluster formation in crystalline silicon, Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. Electrochem. Soc. Proc. (1996) 273-287

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