Chapter 2. Multiscale Modeling of Nanoscale Aggregation Phenomena: Applications in Semiconductor Materials Processing

Authors: Talid Sinno
Publication Date: June 21, 2009
Journal: Multiscale Modeling of Particle Interactions: Applications in Biology and Nanotechnology

Citation: T. Sinno, Multiscale Modeling of Nanoscale Aggregation Phenomena: Applications in Semiconductor Materials Processing, in: Multiscale Modeling of Particle Interactions: Applications in Biology and Nanotechnology, eds. M. R. King and D. J. Gee, Wiley (2009).

This chapter contains:

  • Introduction
  • Large-Scale MD Simulations of Microstructural Evolution
  • Mechanistically Validated LKMC Modeling of Atomic Aggregation
  • Spatial Coarse Graining of LKMC Simulations
  • Conclusions and Future Directions